MultiSEM 505 Ultra-High-Throughput Multi-Beam Field Emission Scanning Electron Microscope innovatively integrates 61 electron beams to work simultaneously, achieving high throughput and high-resolution parallel imaging. Whether in materials science or life sciences, its throughput can reach dozens of times that of traditional single-beam scanning electron microscopes, greatly accelerating the progress of scientific research and industrial applications. Currently, the MultiSEM 505 Ultra-High-Throughput Multi-Beam Field Emission Scanning Electron Microscope is operating well and is fully open to provide technical services. The main configurations and functions of the system are as follows:
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Main Functions and Features:
Multi-Beam Electron Optical System: The MultiSEM achieves extremely fast imaging speeds by employing multiple electron beams and detectors in parallel. The key to this method is a finely tuned detection path (in red), which can collect a large number of secondary electrons for imaging with a multi-detector array. Each electron beam performs a synchronized scanning program at a position on the sample to obtain individual sub-images, arranged in a distinct hexagonal pattern. By merging all sub-images together, a complete image is formed. A parallel computer setup is used for rapid data recording to ensure extremely high overall imaging speed. In the MultiSEM system, image acquisition and workflow control are completely independent to ensure optimal performance.
Figure 1. Working Principle of MultiSEM (Image material from Zeiss official website)
Ultra-Fast Image Acquisition Speed at Nanometer Resolution: The parallel operation of multiple electron beams results in excellent overall imaging speed, with imaging of a 1 mm² area at a pixel size of 4 nm taking only a few minutes. With outstanding imaging speed, it can image large volume objects (>1 mm³) with continuous ultra-thin slice samples at nanometer image resolution. Optimized detectors effectively collect secondary electron signals, providing high-contrast images at low noise levels.
Automatic Slice Detection: The ZEN software used for MultiSEM employs an automatic slice detection algorithm, saving hours of manual marking operations. All slices can be automatically marked through template matching and defined as regions of interest for experimental settings.
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Main Specifications and Technical Indicators:
Image Resolution: Average image resolution of all electron beams @1.5 kV ≤3.5 nm;
Uniformity of Image Resolution: @1.5 kV spacing ≤±0.5 nm;
Landing Energy Range: 1.0-3.0 kV;
Electron Beam Layout: Electron beam pattern is hexagonal, number of electron beams is 61, spacing (single beam imaging width) is 12 μm, uniformity of spacing ≤±1%;
Field of View (FOV): Long axis of hexagon 108 μm;
Electron Beam Current: Single electron beam ≥570 pA, total current ≥35 nA, uniformity ≤±10%;
Working Distance: 1.4 mm;
Scanning Rate: Maximum of 20 MHz per beam, providing different discrete scanning speeds.
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Main Applications:
Life Science Imaging:
Figure 2. 50 nm thick slice of mouse brain. Pixel size is 4 nm, covering a hexagonal field of view of 108 µm × 94 µm. (Image material from Zeiss official website)
Materials Science Imaging:
Figure 3. High maturity shale sample with a wide ion beam cutting surface. Pixel size is 4 nm, covering a field of view of 108 µm × 94 µm. (Image material from Zeiss official website)
Technical References
1. Eberle AL, Mikula S, Schalek R, et al. High-speed, high-resolution multibeam electron microscopy. Nature Methods. 2015;12(6):597-599.
2. The MICrONS Consortium. Functional connectomics spanning multiple areas of mouse visual cortex. Nature 640, 435–447 (2025).
On-Site Images of the Equipment:
Equipment Storage Location:
Room 2109, Building 2, Multimodal Cross-Scale Biomedical Imaging Facility, Huairou District, Beijing
Equipment Responsible Person:
Dr. Niu Jiahao (18810386760)
Equipment Reservation Link:https://ioc.nbic.cn:37218/#/equipment/detail?id=634784613591422149
(Please contact the equipment responsible person in advance and register for an account on the Peking University Equipment Management Platform.)
Previous Reviews:
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Discussion on Advanced Biomedical Imaging Equipment (Series 1: Polar-SlM Polarized Structured Light Super-Resolution Microscopy System)
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Discussion on Advanced Biomedical Imaging Equipment (Series 2: Optical Diffraction Tomography Imaging System ODT)
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Discussion on Advanced Biomedical Imaging Equipment (Series 3: Horizontal Magnetoencephalography System)
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Discussion on Advanced Biomedical Imaging Equipment (Series 4: MINFLUX Single-Molecule Super-Resolution Microscope)
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Discussion on Advanced Biomedical Imaging Equipment (Series 5: Spectra 300 (S)TEM Field Emission Transmission Electron Microscope)
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Discussion on Advanced Biomedical Imaging Equipment (Series 6: Multi-Probe Dual-Color High-Resolution Miniaturized Multiphoton Microscope)
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Discussion on Advanced Biomedical Imaging Equipment (Series 7: Micro-CT-Xradia 515 Versa)
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Discussion on Advanced Biomedical Imaging Equipment (Series 8: Small Animal In Vivo Optical Imaging System)
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Discussion on Advanced Biomedical Imaging Equipment (Series 9: Small Animal High-Frequency Ultrasound-Photoacoustic Dual-Mode Imaging System)
- Discussion on Advanced Biomedical Imaging Equipment (Series 10: 200kV Light Emission Ultra-Fast Cryo-Transmission Electron Microscope)
- Discussion on Advanced Biomedical Imaging Equipment (Series 11: 100 kV Field Emission Cryo-Transmission Electron Microscope)
- Discussion on Advanced Biomedical Imaging Equipment (Series 12: Three-Photon Microscope)
- Discussion on Advanced Biomedical Imaging Equipment (Series 13: LSM 980 Laser Scanning Confocal Microscope)