1. Core Application Scenarios
– Wafer Preparation: Regulating workshop temperature and humidity to ensure silicon wafer purification accuracy and avoid impurity interference.
– Process Processing: Adapting to core processes such as photolithography, etching, and thin film deposition, providing stable gas source control for process accuracy.
– Wafer Cleaning: High-pressure clean air blowing across the wafer surface to remove tiny impurities and prevent secondary contamination.
– Packaging Testing: Driving pneumatic equipment to complete chip packaging and testing, ensuring packaging sealing integrity.
– Clean Room Maintenance: Maintaining indoor cleanliness, eliminating oil mist and fine dust, suitable for high-precision production environments.
2. Mandatory Selection Standards
1. Air Quality (Core Red Line)
– Oil-Free Level: Must meet ISO 8573-1 Class 0, with oil content ≤0.001mg/m³ (oil cannot be detected), to avoid wafer short circuits and equipment contamination.
– Dew Point Requirement: ≤-70℃ (water vapor content ≤2.6ppmv), to prevent condensation from damaging precision components.
– Particle Control: Filtration precision ≤0.1μm, to eliminate micro-dust that could scratch the wafer surface.
2. Operating Performance (Ensuring Production Line Stability)
– Pressure Accuracy: Pressure fluctuation ≤±0.05bar, suitable for precise actions of pneumatic equipment, avoiding process deviations.
– Energy Consumption Requirements: Preferably select permanent magnet variable frequency models, efficient operation under full load, meeting the energy-saving needs of high energy consumption scenarios in semiconductors, with energy recovery rates of over 90%.
– Low Disturbance Operation: Noise ≤75dB(A), vibration amplitude ≤0.5μm, to avoid interference with precision equipment such as photolithography.
3. Equipment Reliability
– Mean Time Between Failures (MTBF) ≥40,000 hours, suitable for 24-hour continuous production lines, reducing unplanned downtime losses.
– Supports intelligent monitoring, with built-in rotor displacement, motor temperature, and over 30 other parameter warnings for preventive maintenance.
3. Mainstream Models and Core Advantages
1. Water-Lubricated Oil-Free Screw Compressor: Pure water-lubricated sealing, isothermal compression. Suitable for medium to large production lines with high cleanliness requirements. 100% oil-free contamination, high energy efficiency, large exhaust volume, long bearing life, and maintenance-free.
2. Oil-Free Scroll Compressor: Non-contact dynamic and static discs, special coating sealing. Suitable for small packaging and automation. Multiple main units can operate without interruption.
3. Dry Oil-Free Screw Compressor: Special coating on the screw, gas-oil seal separation. Suitable for medium to small packaging testing lines. Compact structure, extremely low oil content, and low maintenance costs.
4. Magnetic Levitation Oil-Free Centrifugal Compressor: Magnetic levitation bearings, variable frequency drive for ultra-large flow production lines (e.g., wafer fabs). No mechanical contact, extremely low vibration. Variable frequency adapts to dynamic loads, saving over 30% energy.
4. Supporting Equipment (Ensuring Gas Source Standards)
1. Drying Equipment: Uses a combination of refrigeration and adsorption dryers, stabilizing the dew point ≤-70℃.
2. Filtration System: Multi-stage precision filtration (pre-filtration + fine filtration + activated carbon filtration) to intercept particles and residual impurities.
3. Air Storage Tank: Buffers gas pressure fluctuations, matching peak gas demand in production lines, ensuring stable gas supply.
5. Core Value
1. Ensuring Yield: Eliminating oil contamination from the source, reducing wafer rework rates, with some scenarios increasing yield by over 1%.
2. Reducing Costs: Energy-saving design reduces electricity expenses, fewer consumable parts, and maintenance-free lubrication oil, compressing operational costs.
3. Compliance and Access: Meets Class 0 certification and semiconductor industry GMP, IPC, and other standards, breaking through capacity expansion barriers.
Bonais is a comprehensive high-tech enterprise engaged in R&D, production, manufacturing, marketing, and service, focusing on silent, oil-free brand manufacturing for 13 years. It is one of the influential suppliers of air compressor system equipment in the air power industry.
Bonais oil-free compressed air systems meet high GMP industry standards and medical gas requirements, widely used in: medical, laboratories, pharmaceuticals, precision instruments, semiconductors, oxygen production, nitrogen production, new energy, and automation industries.
Bonais provides integrated compressed air system solutions for customers, committed to the development of a carbon-neutral era. Green mountains and clear waters make life better!