In semiconductor factories, the Facility System plays a crucial role in maintaining a clean environment, ensuring process safety, and providing stable energy and auxiliary utilities. As equipment structures become increasingly complex and environmental control requirements continue to rise, a responsive, clearly structured, and efficient facility monitoring system becomes particularly important.

To address this need, the High-Performance Facility Monitoring & Control System (HP-FMCS) has emerged, covering clean systems, exhaust systems, cooling water systems, chilled water systems, hot water systems, and heat recovery systems, providing a stable, safe, and intelligent operational platform for the semiconductor industry.

The system fully adopts high-performance human-machine interface design concepts, emphasizing key information display, real-time trend analysis, and efficient human-machine interaction capabilities, enabling operators to obtain the most critical operational data in the shortest time, thus achieving higher safety, more precise control, and more stable operation.

The entire control system is structured by units, designed hierarchically with units and sub-devices, achieving modularity and flexible logical reuse. Coupled with a unified screen style, clear color grading, and a concise layout, HP-FMCS becomes a truly “quickly deployable, easy to maintain, and easy to expand” facility control platform.

High-Performance Control Capabilities of Six Major Systems

01 Clean System: The Core Guarantee of Environmental Stability

HP-FMCS provides high-precision, rapid-response control strategies for semiconductor clean systems, including:

• Precise control of MAU temperature and dew point, stabilizing the basic air supply state of the entire room group

• Pressure regulation of high-flow MAU, maintaining reliable airflow organization in clean areas

• Precise adjustment of temperature and humidity in clean rooms, suitable for the strict environmental requirements of different process areas

• Real-time display of key room condition trends, facilitating quick assessment of changes in environmental quality such as temperature, humidity, and pressure differentials

These capabilities ensure long-term stability of the clean environment, further supporting high yield rates of critical processes.

02 Exhaust System: Stable and Reliable Waste Gas Treatment and Safety Assurance

The safety of the exhaust system is directly related to the process and personnel environment. HP-FMCS features:

• Adaptive pressure regulation of the collection pipe, dynamically controlling exhaust capacity based on actual process exhaust changes

• Stable fan switching, achieving smooth transitions between backup and main units, enhancing continuity

• Comprehensive safety interlock protection, automatically identifying, alarming, and protecting against abnormal exhaust conditions

This ensures that the exhaust system remains in a safe, controllable, and continuous operating state.

03 Cooling Water System: Efficient Heat Dissipation with Automatic Regulation

To ensure equipment heat dissipation efficiency, the cooling water system under HP-FMCS achieves:

• Automatic load adjustment of cooling tower units, optimizing start and stop based on environment and load

• Stable control of outlet water temperature, ensuring that process equipment operates within the optimal temperature range

This effectively reduces energy consumption and enhances overall cooling performance.

04 Chilled Water System: Intelligent Monitoring and Guidance of Core Energy Consumption

As one of the largest energy systems in facility management, the chilled water system under HP-FMCS features:

• Real-time monitoring of chiller load status, visualizing key data such as chiller operation, load, and energy efficiency

• Automatic guidance for starting/stopping, reducing the risk of operational errors through standardized procedures

This enhances the operational safety, energy efficiency, and controllability of the chilled system.

05 Hot Water System: Automated Operation for Stable Heating Supply

In the hot water system, HP-FMCS provides intelligent scheduling and stable control, including:

• Fully automatic load adjustment of pumps, optimizing pump operation based on pressure and demand

• Stable pressure control, ensuring safe, smooth, and continuous heating supply in the hot water network

This effectively extends equipment lifespan and reduces operational burden.

06 Heat Recovery System: An Important Unit for Energy Saving and Efficiency Enhancement

HP-FMCS supports refined management of the heat recovery system, balancing energy savings with process requirements:

• Real-time monitoring of plate heat exchanger temperature, ensuring heat exchange efficiency and equipment safety

• Stable control of supply water temperature, maintaining stable output of recovered energy and improving energy efficiency returns

This provides solid technical support for reducing energy consumption and carbon emissions in factories.

Conclusion: A High-Performance, Stable, and Intelligent Facility Control Foundation

HP-FMCS is not just a monitoring platform; it is the core foundation for semiconductor facility management on the path to digitalization, energy saving, and intelligence. Through high-performance interface design, standardized unit structures, rich trend analysis, and automated control strategies, HP-FMCS is bringing to factories:

• Higher operational stability

• Safer system assurance

• More precise environmental and equipment control

• Stronger energy-saving optimization capabilities