C900 Capacitive Displacement Sensor

C900 Capacitive Displacement Sensor

Our company independently develops and produces its products.

C900 is a capacitive displacement sensor with nanometer resolution and ultra-high precision.

It is a capacitive, non-contact displacement measurement instrument, featuring high resolution, excellent accuracy, stability, and repeatability, providing a perfect solution for many measurement applications that were previously unattainable. Its fast response time and extremely low noise levels make it an ideal choice for critical measurements of targets such as rotating spindles and shafts, discs, tires, and wafers.

Features:

Applications:

  • Non-contact, non-destructive measurement

  • Real-time process measurement up to 5 kHz

  • Excellent temperature stability using passive capacitive probes

  • Displacement, thickness, size

  • Runout, vibration

  • Flatness or profile, internal/external diameter

Performance Parameters

Output Signal

0~10Vdc

Maximum Adjustable Offset

-5Vdc

Range

0-12mm

Resolution

0.000075%*√Hz*FS RMS

0.00167%*FS @500Hz RMS

For example, range 500μm, resolution 8nm

Linearity

±0.02% FS

Repeatability

±0.02% FS

Frequency Response

500Hz (default)

Optional 100Hz, 1kHz, 5kHz or 660Hz

Output Noise

-3dB@500Hz 0.20 mV rms, 1 mV p-p

-3dB@1kHz 0.28 mV rms, 1.4 mV p-p

Warm-up Time

30 minutes

Operating Temperature

Controller

0 ~ 40°C

Probe

-120°C ~ 200°C

Optional high-temperature probe-120°C ~600°C(ceramic package)

Input Voltage

±15 Vdc, greater than300 mA

Temperature Stability

±0.01% FS/°C (after 30 minutes of warm-up)

Time Stability

±0.01% FS/100 hours (after 30 minutes of warm-up)

Weight, Dimensions

200g, 152.5*108*30mm

FS=Full Scale =full scale

ControllerC900

The standard version controllerC900, as shown in Figure1, is housed in an aluminum alloy box, providing excellent anti-interference capability. The front panel features2 SMA connectors for connecting the sensor probe and output signal, while the rear panel has anI/O port, which is a9pin connector.

C900 Capacitive Displacement SensorFigure1, ControllerC900 schematic

C900 Capacitive Displacement SensorFigure2, Actual image of the controller

Sensor Probe

Currently, only3 types of probes have been designed, all with a range of500μm, but with different structural forms. The standard versionC0815 is usually in stock, while the other2 types of probes may need to be ordered for production; the default cable length is2m, and all connectors areSMA male. Customization is also available upon request.

Probe Model Diagram
C0815Range 500μm C900 Capacitive Displacement Sensor
C0835-SMARange 500μm C900 Capacitive Displacement Sensor
C0810-PAN Range 500μm C900 Capacitive Displacement Sensor

Table1, Sensor Probes

Order Example:

C900 – C0815
(1) (2)

(1), Controller model, standard versionC900

(2), Probe model, see Table1. Probe cable length, default2m.C0835-SMA comes with a2m adapter cable.

Usage of Probe Range

It is recommended to use the full range of10%~90%, as shown in Figure2.

C900 Capacitive Displacement Sensor

Figure2, Probe Range

Installation and Usage

1. Probe Connection

The controllerC900 has an SMA female connector labeled Probe on the front panel for connecting the sensor probe, which has an SMA male connector. It is particularly important to note that the probe housing carries approximately3V voltage, so the probe housing must be grounded or connected back to the power supply’s GND, as shown in the wiring diagram in Figure3.

2. Power and OutputI/O

I/O port is located on the rear panel of the controllerC900 labeled Power&Output, for power supply and output.

Power supply requirements are ±15Vdc( error±0.5Vdc), power noise less than0.01Vdc p-p, current not less than300mA.

3. OutputOutput

The output signal is an analog voltage0~10Vdc, which can be connected to the SMA connector labeled Output on the front panel of the controller or the output on the rear panel’sI/O port, which can be used to connect to a digital multimeter or data acquisition card.

C900 Capacitive Displacement Sensor

Figure3, Wiring Diagram

C900 Capacitive Displacement Sensor

Figure 4, Measured Resolution 2.7nm RMS, 22.6nm p-p

C900 Capacitive Displacement SensorC900 Capacitive Displacement SensorC900 Capacitive Displacement SensorC900 Capacitive Displacement Sensor

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