In the manufacturing of semiconductor equipment, advanced ceramics play a crucial role as key component materials. Among various ceramic materials, alumina ceramics are widely used in semiconductor equipment due to their stable material structure, high mechanical strength, high hardness, high melting point, corrosion resistance, excellent chemical stability, high resistivity, and good electrical insulation properties.In semiconductor … Read more
Click the blue textto follow us Through high selectivity etching, specialized etching tools remove or etch materials from the microchip structures during the IC production process. Furthermore, these high selectivity etching tools can remove materials in any direction (isotropic) without damaging other parts of the device. In some cases, high selectivity etching tools can also … Read more
Dry Etching: Using gaseous chemical etchants to react with materials to form volatile by-products that can be removed from the substrate, achieving the purpose of etching. Role of Plasma: Generates free radicals, enhancing the rate of chemical reactions; Simultaneously possesses ion bombardment capability, which can physically remove materials from the surface and break chemical bonds … Read more