Unveiling the Design of MEMS Pressure Sensor Chips: From Thin Films to Resistors, Key to 0.1% F.S. Accuracy
The barometer in your phone and the tire pressure monitoring system in your car are both powered by a “compact yet precise” MEMS pressure sensor. It operates based on the piezoresistive effect of silicon, measuring only in millimeters, yet it can accurately sense pressure changes. This design document from Wang Dajun’s team breaks down the … Read more