The Uses and Production Process of Reticles and Photomasks in Semiconductor Lithography Materials
What is a Reticle (Photomask/Mask)? Reticles and photomasks are collectively referred to as PhotoMasks (including Reticle, Mask). •[Mask,Pellicle (protective film),DUV,ArF,I-line,EUV,reflective masks] Reticle is a photomask that contains the designed pattern in the lithography process. The detailed structure of the mask includes a Pellicle (thin polymer functional film) and a quartz glass plate, and it blocks … Read more