Fluorinated materials refer to a class of polymeric synthetic materials that contain fluorine atoms in their molecular structure, known for their excellent chemical resistance, high and low temperature resistance, low dielectric constant, low friction coefficient, and hydrophobic and oleophobic properties.
Today, I will briefly introduce the classification of fluorinated materials, their applications in the semiconductor industry, and related companies.
1. Classification of Fluorinated Materials
They can be mainly divided into the following categories:
1. Fluororesins (Plastics)
This is the most widely used type of fluorinated material, typically semi-crystalline polymers.
Polytetrafluoroethylene (PTFE): Commonly known as “the king of plastics.” It has the best chemical inertness, a wide operating temperature range (-190°C to 260°C), an extremely low friction coefficient, and dielectric constant. However, its disadvantages include difficulty in processing (usually formed by sintering) and poor mechanical properties.
Fluorinated Ethylene Propylene Copolymer (FEP): This can be seen as a modified version of PTFE, incorporating propylene units. It retains most of PTFE’s excellent properties but has a lower melting point, allowing for processing methods like melt extrusion, making it widely used in pipeline linings and cable insulation.
Melt-Processable PTFE (PFA): Developed to improve the processing performance of PTFE. Its properties are very close to PTFE, with better temperature resistance than FEP, and it can also be processed by melting, commonly used for manufacturing high-demand semiconductor-grade pipes, valves, and containers.
Polyvinylidene Fluoride (PVDF): It has high mechanical strength, good radiation resistance, and exhibits piezoelectric and thermoelectric properties. Its chemical resistance is slightly lower than that of PTFE/FEP/PFA, but it still has good resistance to halogens and oxidizers. It is commonly used in the manufacture of pumps, pipelines, and cleanroom construction materials.
Ethylene-Tetrafluoroethylene Copolymer (ETFE): It has excellent impact strength, wear resistance, and tear resistance, with one of the best mechanical properties among fluororesins. It is commonly used in chip carriers, cable sheaths, etc.
Tetrafluoroethylene-Perfluoroalkyl Vinyl Ether Copolymer (PFA): (Often grouped with the above PFA, with similar properties).
Polytrichloroethylene (PCTFE): It has excellent gas barrier properties and extremely low moisture permeability, commonly used for packaging high-purity chemicals.
2. Fluoroelastomers (FKM)
Fluoroelastomers are elastomers that contain fluorine atoms in the main chain or side chains, known for their excellent high-temperature and chemical resistance (especially to oils, fuels, acids, and solvents).
In semiconductors, they are mainly used to manufacture O-rings, seals, diaphragms, and other dynamic or static sealing components for vacuum chambers, pump valves, and corrosive chemical transport systems.
3. Perfluoroether Rubber (FFKM)
This can be seen as the “ultimate” version of fluoroelastomers, with molecular chains that contain no hydrogen atoms, consisting only of carbon, oxygen, and fluorine atoms.
It has chemical resistance and extreme high-temperature performance (up to over 300°C) that surpasses FKM, capable of resisting the corrosion of almost all chemicals.
In semiconductors, it is used in the most demanding process steps, such as plasma etching and critical seals in chemical vapor deposition (CVD) chambers, being a key material to ensure ultra-high vacuum and contamination-free process chambers.
4. Fluorinated Coatings and Fluorinated Fluids
Fluorinated Coatings: Used to provide a non-stick, corrosion-resistant protective layer for equipment components.
Fluorinated Fluids: Such as perfluoropolyether (PFPE), which has chemical inertness, non-flammability, and thermal stability, commonly used as vacuum pump oil and thermal cooling fluids in semiconductor equipment.
2. Applications in Semiconductor Manufacturing
Semiconductor manufacturing is an extremely precise industrial process, with nearly stringent requirements for material purity, stability, and corrosion resistance. Fluorinated materials, due to their unique properties, are involved throughout the entire chip manufacturing process.
Core requirements:
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Ultra-high purity: Avoid introducing impurities such as metal ions that could contaminate wafers.
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Excellent chemical resistance: Resist corrosion from strong acids (hydrofluoric acid, sulfuric acid, nitric acid, hydrochloric acid), strong bases, strong oxidizers, highly reactive plasmas, and various high-purity solvents.
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High-temperature resistance: Adapt to high-temperature processes such as CVD, diffusion, and ion implantation.
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Low outgassing: Do not release gas molecules in a vacuum environment, avoiding damage to vacuum levels and contamination of chambers.
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Outstanding electrical performance: Such as low dielectric constant, suitable for electrical insulation components.
Specific application scenarios:
1. High-purity chemical transport systems
Pipes and pipelines: PFA is the preferred material for manufacturing transport pipes for ultra-high purity chemicals (such as sulfuric acid, hydrofluoric acid, hydrogen peroxide, etching solutions, photoresist solvents). Its inner walls are smooth, preventing particle adhesion, and it does not leach contaminants.
Valves, fittings, pumps, and tanks: PTFE, PFA, and PVDF are widely used to manufacture key components of these systems, ensuring the purity and corrosion resistance of the entire transport path.
2. Wafer Processing Equipment (Fab Equipment)
Process chamber components:
Etching and CVD chambers: Internal components such as showerheads, gas distribution plates, focus rings, and chamber liners are largely made from materials like PTFE and PFA to withstand corrosive process gases (such as CF₄, SF₆, Cl₂) and plasma bombardment.
Seals: Static and dynamic seals at chamber doors, windows, and electrode feedthroughs use FKM (for general conditions) and FFKM (for extreme conditions) based on the severity of the working conditions. FFKM is crucial for maintaining ultra-high vacuum in highly corrosive plasma environments.
Wet Bench Processes:
For wafer cleaning and etching, tanks, baskets, and fixtures commonly use PVDF or PP (polypropylene) linings, but critical components and high-end applications will use PFA.
3. Advanced Lithography Technologies
EUV Photoresists: Extreme ultraviolet (EUV) lithography is a key technology for producing chips below 7nm. Next-generation fluorinated chemical amplification photoresists are being developed because fluorine atoms have a high absorption efficiency for EUV light, which can improve lithography sensitivity and resolution.
4. Chemical Mechanical Polishing (CMP)
Polishing pad carrier films: CMP polishing equipment has a critical thin film in the polishing head that evenly transmits pressure downward and holds the wafer. PTFE coatings or composite films are used here due to their non-stick and chemical stability properties.
5. Vacuum Systems
Vacuum pumps: Dry pumps and molecular pumps in semiconductor equipment widely use FFKM as sealing materials. Additionally, perfluoropolyether (PFPE) oil is commonly used as the working fluid for vacuum pumps due to its extremely low vapor pressure and chemical inertness.
6. Cables and Connectors
In corrosive factory environments, FEP and ETFE are used as insulation sheaths for critical sensors and cables, ensuring stable signal transmission and equipment safety.
3. Companies Related to Fluorinated Materials
Based on recent exhibitions, I will briefly list companies related to fluorinated materials and their main products. More contributions are welcome.
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Company |
Main Products |
|---|---|
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Shandong Dongyue Polymer Materials Co., Ltd. |
Fluororesins, Fluoroelastomers, Fluorosilicone Rubber |
|
Daikin Fluorochemicals (China) Co., Ltd. |
Fluororesins, Rubber, Coatings |
|
Dongguan Hongxin Fluoroplastic Products Co., Ltd. |
One-piece Teflon cleaning tanks, Teflon candy, Teflon welding tanks |
|
Jiangsu Xufu New Materials Co., Ltd. |
PTFE tanks, PTFE baskets, PTFE machined parts, PTFE CUPPITE boards and rods |
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Zhejiang Kexai New Material Technology Co., Ltd. |
PTFE TANK, PTFE CUP, machined parts, special engineering profiles |
|
Nanjing Kent Composite Materials Co., Ltd. |
PTFE/PCTFE/PPA/P1/PEEK products |
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ZTE Chemical Trade (Shanghai) Co., Ltd. |
PTFE tanks and boxes |
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Shanghai Inavision Hydraulic Systems Co., Ltd. |
Perfluorosilicone rubber seals, semiconductor application seals |
|
Qingdao Xinflo New Material Technology Co., Ltd. |
O-rings for semiconductors (extra-large, large, medium, small), ESC rings, special-shaped rings, flat door seals, gate valve seals |
|
Shanghai Ge Yi Optoelectronic Materials Co., Ltd. |
Engineering plastic parts, industrial rubber parts, perfluorinated seals |
|
Wuxi Haichuang Semiconductor Co., Ltd. |
Perfluorosilicone seals, door panels, MKS, vacuum valves, ESC |
|
Xiamen Xulong Sealing Co., Ltd. |
Perfluoro O-rings, center rings, rubber seals, engineering plastic parts, custom metal parts |
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Shanghai Xijia Precision Technology Co., Ltd. |
Raw materials: FFKM/special FKM/PFA, O-rings, bonded door seals, high-purity plastic parts/composite parts, |
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Shanghai Jianuo Sealing Technology Co., Ltd. |
Perfluorosilicone parts, perfluorosilicone O-rings, custom special-shaped parts, slit valve plates, NW flange rings, rotary shaft seals, spring accumulators |
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Daikin Qingyan Advanced Technology (Huizhou) Co., Ltd. |
① Perfluoro rubber seals ② FFKM O-rings ③ Perfluoro rubber FEM sealing parts |
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Boiling Point Sealing Technology (Jiangsu) Co., Ltd. |
Perfluorosilicone KK/KH/KS and the entire series of fluorinated O-rings |
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Dongguan Taike Sealing Technology Co., Ltd. |
Perfluoroether seals, corrosion-resistant seals, plate valves, gate valves |
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Jinsiling (Heyuan) Technology Co., Ltd. |
PTFE threaded parts, seals, special-shaped parts, molded parts, filled parts, sealing rings |
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Shanghai Xinyi Technology Co., Ltd. |
Perfluorinated seals, static seals, pipeline seals, pendulum valve seals, gate valves |
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Jiangyin Jiangnan Fluoroplastic Co., Ltd. |
PVDF pipe fittings, high-purity PFA lined diaphragm valves |
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Zixing Yuguang Pipeline System Co., Ltd. |
PVDF/PPH valve pipeline fittings, double ferrule joints, FEP/PFA/PE hoses, PFA/PTFE joints, PP fittings, water treatment equipment |
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Zhejiang Jiaxiang Fluoroplastic Co., Ltd. |
Polytetrafluoroethylene semiconductor tanks, ultra-pure PFA semiconductor joints, ultra-pure PFA semiconductor pipes, PTFE semiconductor supporting products |
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Devin Innovation (Shanghai) Semiconductor Equipment Technology Co., Ltd. |
Ultra-clean PFA fluid components (joints/valves/pipes) for wafer processing, ultra-clean PFA filler polymer material customization |
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Rifluor Polymer Materials (Shanghai) Co., Ltd. |
ETFE films, FEP films, PFA pipes/joints/seats, fluorinated material precision processing parts |
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Jiangsu Ruifluor Ultra-clean Technology Co., Ltd. |
Ultra-pure PFA pipes/PFA rods/PFA plates, PCTFE pipes/rods |
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Kelingda Semiconductor Technology (Shanghai) Co., Ltd. |
High-purity PFA joints, high-purity pipe valve components, high-purity sensors, high-purity corrugated pipe spring tubes, PFA PTFE custom processing parts |
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Yiflu Sealing Parts (Wuxi) Co., Ltd. |
Four fluorinated molded pipes, four fluorinated molded plates, four fluorinated films |
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Hangzhou Kebaiter Filter Material Co., Ltd. |
High-precision liquid and gas filtration purification solutions, ultra-clean PFA pipe valve pump, ultra-clean PVDF pipeline systems |
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Alpha New Materials (Liaoning) Co., Ltd. |
① High-purity PFA pipelines and systems for semiconductors ② PTFE corrugated pipes ③ PTFE inner flat outer corrugated pipes ④ PTFE extrusion |
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Fluorowei Polymer Materials (Shanghai) Co., Ltd. |
Fluorinated stainless steel valves/pipes, PFA/PTE products, backing fiberglass boards, fluoroplastic raw materials |
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Xunshi Technology (Suzhou) Co., Ltd. |
High-purity PFAR diaphragm valves, high-purity PFAR joints, high-purity PFAR pipes, sensors, pumps |
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Qingdao Hanxing New Materials Co., Ltd. |
Polytetrafluoroethylene membranes, pump bodies, valve bodies, pipes, etc. |
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Mikna Precision Technology (Suzhou) Co., Ltd. |
PFA pneumatic diaphragm valves (3/4″, 1/2″, 1/4″, 1/8″, etc.) |
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Ningbo Taifuno Fluoroplastic Products Co., Ltd. |
Various products made from PTFE, PPA, PCTFE, PVDF, and other nitrogen-containing resins |
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Guangdong Huayue Plastic Products Co., Ltd. |
PFA pipes, FEP pipes, PTFE pipes, PFA joints, PFA corrugated pipes |
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Jiangsu Derongte New Materials Co., Ltd. |
PTFE hoses, PFA pipes, rubber hoses for cooling, ferrule joints |
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Jiangsu Xiangjian New Material Technology Co., Ltd. |
PTFE products, PFA products, PCTFE products |
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Beijing Ruishan Boyuan Technology Development Co., Ltd. |
Windbag pumps, PFA joints, PFA valves, water gas guns, barrel joints, non-standard fluoroplastic processing for crystal growth |
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Shanghai Teflon Technology Co., Ltd. |
SEBA valves, SEBA pressure sensors, EFI high-purity FFA pipes, EFI high-purity PFA joints, PFA pneumatic manual diaphragm valves |
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Nantong Jinmulian Fluid Technology Co., Ltd. |
PFA; hoses, corrugated pipes, spring pipes, joints, valves, PTFE/PVDF/PP; joints, valves, non-standard custom chemical processing |
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Xiamen Baifuda Technology Co., Ltd. |
PFA fluorinated internal threaded NPT joints |
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Jiuyan Technology (Shanghai) Co., Ltd. |
CLEAN PVC / UPVC / CPVC / PVDF / PFA / PP and other industrial plastic pipe products |
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Shanghai Jufu Plastic Technology Co., Ltd. |
PVDF products, valves, pipeline linings |
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Kunshan Taisheng Material Technology Co., Ltd. |
Special engineering plastic design and processing for semiconductors, PP/PVC cabinet tank cleaning machines, fume hoods, PEEK, PTFE processing, high-performance engineering plastic sheets |
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Jiangsu Linwei New Materials Co., Ltd. |
|
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Dongguan Sheng’an Plastic Machinery Co., Ltd. |
PFA ultra-clean pipe precision extrusion production line, heat shrink tubing precision extrusion production line, high-temperature fluoroplastic rod extrusion production line, PEEK production line |
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Foshan Hairuijia Precision Extrusion Machinery Co., Ltd. |
Ultra-pure PFA extrusion production line, precision fluoroplastic conduit extrusion production line, double-layer pipe extrusion production line |
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Aijieshu Chemical Technology (Shanghai) Co., Ltd. |
ETFE release films, adhesive fluororesins, fluororubber FFKM |
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Songshan San Industry (Shenzhen) Co., Ltd. |
PEEK, PPS, PVDF, PTFE and other engineering plastic screws; custom ultra-small precision springs: ultra-precision machined parts: original Japanese production |
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Shenzhen Youpin Electric Heating Technology Co., Ltd. |
Teflon heaters, PPA inline heaters, immersion PPA heaters, shell-and-tube PPA heat exchangers, immersion heat exchangers |
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Enxing Engineering Plastics (Shanghai) Co., Ltd. |
PEEK, PPS, PI, PVDF, PEI and other plastic processing parts CMP grinding ring cleaning machine Chuck PEEK welding parts (Wafer |
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Suzhou Anheda Plastic Products Co., Ltd. |
PEEK, PVDF, PP, PTFE, PI |
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…… |