
Recently, Shanghai Xinchang Micro Equipment has successfully completed the factory debugging and acceptance of its first 350nm stepper lithography machine (AST6200), which is now on its way to the customer site. According to official news from Shanghai Xinchang Micro Equipment, the AST6200 lithography machine is specifically designed for advanced manufacturing scenarios such as power semiconductors, RF chips, optoelectronic devices, and Micro LED, meeting the downstream industry’s demand for high-precision lithography processes, and will help enhance the domestic industry’s core component supply capabilities. This equipment integrates self-developed optical system design, precision motion control, and semiconductor process adaptation technology, featuring high performance and high reliability, and achieving full autonomy and control. Information shows that Shanghai Xinchang Micro Equipment was established in February 2025 and is an innovative technology enterprise focused on the research, production, and service of high-end semiconductor equipment. It is committed to providing high-precision, high-performance, and high-reliability equipment solutions for core fields such as chip manufacturing, advanced chip packaging, third-generation semiconductors, and new displays in the “beyond Moore” track. In August of this year, Shanghai Xinchang Micro Equipment successfully delivered its 500th stepper lithography machine to Shenghe Jingwei Semiconductor.
#Semiconductor Equipment #Lithography Machine


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