1. Wafer Fabrication Plants
1.1. Advanced Processes
- Domestic: SMIC
- International: TSMC (Taiwan), Samsung (South Korea), Rapidus (Japan), Intel (USA)
The gap is significant (approximately 2 generations, with SMIC achieving 7nm mass production through multiple polishing):
- TSMC – 3nm/5nm/7nm account for over 70% of revenue, with 2nm risk production starting this year.
1.2. Mature Processes
- Domestic: Hua Hong Semiconductor, Jinghe Integrated
- International: UMC (Taiwan), GlobalFoundries (USA)
The gap is relatively smaller compared to advanced processes.
2. Photolithography Machines
- Domestic: Shanghai Micro Electronics, Yulian Sheng
- International: ASML (Netherlands), Nikon (Japan)
The gap is enormous.
3. Etching Equipment
- Domestic: Northern Huachuang, Zhongwei Company
- International: Applied Materials (AMAT, USA), Lam Research (USA)
Northern Huachuang’s PVD process mainly focuses on mature processes; Applied Materials’ CVD process is the global leader, capable of achieving 2-3nm, progressing towards 1nm with EUV.
4. Thin Film Deposition Equipment
- Domestic: Tuojing Technology
- International: Lam Research (USA), Tokyo Electron (TEL, Japan)
Tuojing Technology focuses on 14~55nm processes.
5. Coating and Developing Equipment
- Domestic: Xinyuan Micro
- International: Tokyo Electron (TEL, Japan)
Xinyuan Micro mainly focuses on mature processes; Tokyo Electron holds over 80% market share, with 100% share in the EUV market.
6. Cleaning Equipment
- Domestic: Yitang Co., Shengmei Shanghai
- International: Dainippon Screen (Japan), Tokyo Electron (TEL, Japan), Lam Research (USA)
The gap is relatively small.
7. CMP Polishing Equipment
- Domestic: Huahai Qingke
- International: Applied Materials (AMAT, USA), Ebara Corporation (Japan)
Huahai Qingke focuses on mature processes above 14nm.
8. Measurement and Testing Equipment
- Domestic: Zhongke Feicai, Jingce Electronics
- International: KLA (USA), Applied Materials (AMAT, USA), Hitachi (Japan)
Domestic technology is evolving from 14nm to 7nm, while international technology has reached 2-3nm levels.
9. Packaging and Testing
- Domestic: Changdian Technology, Tongfu Microelectronics
- International: ASE (Taiwan), Amkor (USA)
The gap is relatively small.
10. Large Silicon Wafers
- Domestic: Shanghai Silicon Industry, Yiswei
- International: Shin-Etsu Chemical (Japan), GlobalWafers (Taiwan)
Shin-Etsu Chemical and GlobalWafers hold over 90% market share.
11. CMP Slurry
- Domestic: Anji Technology, Dinglong Co.
- International: Cabot (USA), Merck (USA), Dow (USA), Fujifilm (Japan), Hitachi (Japan)
The gap is relatively small.
12. Photoresists
- Domestic: Nanda Optoelectronics, Tongcheng New Materials
- International: JSR (Japan), Tokyo Ohka Kogyo (TOK, Japan), Shin-Etsu Chemical (Japan)
Domestic technology has just broken through 28nm, with a significant gap.
13. Electronic Specialty Gases
- Domestic: Huate Gas, Kemet, Yake Technology
- International: Air Products (USA), Linde Group (Germany), Air Liquide (France), Sun Chemical (Japan)
14. EDA
- Domestic: Huada Jiutian, Gai Lun Electronics, Guangli Micro
- International: Synopsys (USA), Cadence (USA), Siemens (Germany)