Plasma is a state of matter formed by the ionization of gas, consisting of equal numbers of positive and negative electrons, which is different from solid, liquid, and gas states and is referred to as the fourth state of matter. Plasma can have high energy and temperature, making it suitable for high-temperature heating, such as arc heating; on the other hand, it has good electrical conductivity and can be controlled by external electric and magnetic fields to manipulate its movement, completing processes such as deposition, etching, cleaning, and surface treatment, widely used in precision manufacturing industries like semiconductors and photovoltaics.
Taking Plasma Enhanced Chemical Vapor Deposition (PECVD) as an example, plasma, after being accelerated, possesses high kinetic energy, which can break chemical bonds of substances, allowing gas-phase deposition to occur at a faster rate or at lower temperatures. Arc plasma power supplies used for high-temperature heating need to have high power and good control capabilities, and their market space is growing with the development of downstream material applications. For instance, high-purity quartz crucibles require high melting points and purity, necessitating the use of arc plasma power supplies for their melting and forming processes. According to a report by Zheshang Securities, the demand for quartz crucibles is expected to increase from 610,000 units in 2022 to 1.38 million units by 2025.
Plasma process control power supplies for precision manufacturing processes need to have characteristics such as high precision, high frequency, high power, and high response speed. These power supplies have high technical barriers in software design, hardware design, and system design, with the market share mainly held by foreign power supply manufacturers. In 2022, the sales of American company AE in the semiconductor equipment sector reached 931 million USD.
Currently, domestic power supply manufacturers are gradually tackling the technology of plasma process control power supplies, which will first be applied in the photovoltaic cell manufacturing field. According to a report by Dongwu Securities, the expected new market scale for industrial control power supplies in the manufacturing of TOPCon cells and HJT cells is 2.17 billion yuan, 2.22 billion yuan, and 2.56 billion yuan, respectively.
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