CCD Image Sensors: Revolutionizing Image Recording

The CCD image sensor based on semiconductor technology has changed the history of how humans record images using film. Today, digital imaging is not only an important tool for scientific analysis but also deeply integrated into everyone’s daily life.

CCD Image Sensors: Revolutionizing Image Recording

Willard S. Boyle (left) and George E. Smith (right) invented CCD technology in 1969.
Source: Literature [1]
In 2009, Willard S. Boyle and George E. Smith were awarded the Nobel Prize in Physics for their invention of the CCD (Charge-coupled Device), or CCD image sensor.
Joseph Nordgren, chairman of the Nobel Prize Committee, stated at the award announcement: “The way we record images in today’s society is entirely based on the research of CCD. The practical significance of this research is immense… it has changed our lives, not only in science but across society.”

Film Era

Before the invention of digital cameras in 1975, the method of recording images was through film. The process can be summarized as follows: Light passes through the camera lens, and the shutter speed determines the amount of exposure. Light causes a chemical reaction in the silver halide on the film, ultimately creating a latent image on the film. The image is then developed in a darkroom to form negatives. The negatives are then processed to produce prints.

CCD Image Sensors: Revolutionizing Image Recording

Film photography requires complex processing to obtain images.

[Image source from the internet]

Invention of CCD

In October 1969, during lunch at Bell Labs, Smith and Boyle were inspired to discuss and brainstorm. After lunch, they continued their discussion and conceived the ubiquitous imaging invention known as CCD. However, the journey from creating a prototype to developing a practical technology usable by scientists and photographers was long and arduous. Although CCD later dominated the field of astronomy, its resolution was very low at the time of its invention, making it practically useless. At that time, the signal-to-noise ratio of CCDs was poor, making it difficult to foresee a bright future for them.

CCD Image Sensors: Revolutionizing Image Recording

First CCD device.

Source: Literature [4]

CCD Image Sensors: Revolutionizing Image Recording

First CCD integrated device.

Source: Literature [4]

CCD Image Sensors: Revolutionizing Image Recording
Early linear imaging CCD.
Source: Literature [4]
In the following years, hundreds of scientists and engineers worked hard to gradually push CCD towards practical use, including contributions from Fairchild, Tektronix, and Texas Instruments in the USA, as well as Sharp, Sony, Toshiba, and NEC in Japan. Applications in aerospace, science, and consumer fields benefited from funding invested from various channels to solve CCD issues, but the problems remained challenging, and it was a very arduous development path.

Principle of CCD

CCD is a type of semiconductor device that converts optical images into digital signals.The tiny photosensitive materials implanted on the CCD are called pixels (Pixel). The higher the pixel count and the larger the area, the higher and clearer the imaging quality. The CCD has many neatly arranged capacitors that can sense light, store signals, and convert images into digital signals. Controlled by external circuits, each small capacitor can transfer its charge to the adjacent image processor to form an image.
MOS capacitors are the most basic units that make up the CCD, and they are the simplest structures in metal-oxide-semiconductor (MOS) devices.

CCD Image Sensors: Revolutionizing Image Recording

MOS capacitor.
Source: Literature [4]
The basic working process of CCD mainly involves the generation, storage, transfer, and detection of signal charges:
(1) Signal charge injection (generation): In CCD, the method of charge injection can be divided into two categories: optical injection and electrical injection. When light shines on the CCD silicon wafer, electron-hole pairs are generated within the semiconductor near the gate. Most charge carriers are repelled by the gate voltage, while a small number of charge carriers are collected in the potential well to form signal charges.

CCD Image Sensors: Revolutionizing Image Recording

Back-illuminated optical injection.
Source: Literature [8]
The so-called electrical injection means that the CCD samples the signal voltage or current through the input structure and then converts the signal voltage or current into signal charges injected into the corresponding potential wells. Common methods of electrical injection include current injection and voltage injection.

CCD Image Sensors: Revolutionizing Image Recording

Electrical injection method.

Source: Literature [8]

(2) Signal charge storage: The second step in the CCD working process is the collection of signal charges, which is the process of collecting the charges excited by incident photons to form signal charge packets.
When a positive bias is applied to the electrode on the surface of SiO2, a depletion region (potential well) is formed in the P-type silicon substrate, and the depth of the depletion region increases with the increase of the positive bias. The minority carriers (electrons) within are absorbed into the region under the highest positive bias electrode, forming charge packets (potential wells). For N-type silicon substrate CCD devices, the minority carriers are holes when a positive bias is applied.

CCD Image Sensors: Revolutionizing Image Recording

Charge storage.

Source: Literature [8]

(3) Signal charge transfer (coupling): The third step in the CCD working process is the transfer of signal charge packets, which is the process of transferring the collected charge packets from one pixel to the next until all charge packets are output.

CCD Image Sensors: Revolutionizing Image Recording

Charge transfer.

Source: Literature [7]

CCD Image Sensors: Revolutionizing Image Recording

Charge transfer method in three-phase CCD.

(a) Initial state; (b) Charge transfers from electrode ① to electrode ②; (c) Charge is uniformly distributed under electrodes ① and ②; (d) Charge continues to transfer from electrode ① to electrode ②; (e) Charge is completely transferred to electrode ②; (f) Three-phase overlapping pulse.

Source: Literature [8]

(4) Signal charge detection: The fourth step in the CCD working process is the detection of charges, which is the process of converting the charges transferred to the output stage into current or voltage.
There are mainly three types of charge output: 1) Current output; 2) Floating gate amplifier output; 3) Floating diffusion amplifier output.

CCD Image Sensors: Revolutionizing Image Recording

Charge detection circuit.

Source: Literature [8]

CCD Image Sensors: Revolutionizing Image Recording

Schematic diagram of the CCD working process.

Source: Literature [6]

CCD image sensors are arrays composed of MOS (metal-oxide-semiconductor) capacitors arranged in a specific pattern.A very thin layer (about 120nm) of silicon dioxide is grown on a P-type or N-type silicon substrate, and then metal or doped polysilicon electrodes (gates) are deposited sequentially on the silicon dioxide thin layer to form a regular array of MOS capacitors, along with input and output diodes at both ends to form the CCD chip.
According to the different arrangements of pixels, CCDs can be divided into two main categories: linear arrays and area arrays.
Linear array CCDs scan one line at a time, and to obtain the video signal of the entire two-dimensional image, a scanning method must be implemented. Linear array CCDs can be further divided into single-channel linear array CCDs and dual-channel linear array CCDs.
Single-channel linear array CCD: Many transfer cycles, low efficiency. Only suitable for imaging devices with fewer pixel units.
Dual-channel linear array CCD: The number of transfer cycles is reduced by half, and its overall transfer efficiency is doubled compared to the original.
CCD Image Sensors: Revolutionizing Image Recording

Linear array CCD.

Source: Literature [6]

Area array CCDs arrange the one-dimensional photosensitive units and shift registers of a linear array CCD into a two-dimensional array in a specific manner. This allows for the simultaneous exposure of the entire image.
Frame transfer area CCD—Advantages: Simple electrode structure, the photosensitive area can be very small. Disadvantages: Requires a larger area for the storage region.
CCD Image Sensors: Revolutionizing Image RecordingFrame transfer area CCD structure and working process.

Source: Literature [6]

Interline transfer area CCD—Advantages: Significantly improved transfer efficiency. Disadvantages: More complex structure.

CCD Image Sensors: Revolutionizing Image Recording

Interline transfer area CCD structure and working process.

Source: Literature [6]

CCD Image Sensors: Revolutionizing Image Recording
Schematic diagram of CCD functions.
Source: Literature [7]

CCD Image Sensors: Revolutionizing Image Recording

Structure of CCD chip.

Image source from the internet.

Development of CCD

The invention of CCD is of epoch-making significance, as its emergence greatly expanded and extended the important organ of human information capture, the eye, by 85%.
Three main factors have promoted the rapid development of CCD: Firstly, CCDs are small in size, light in weight, consume little power, have ultra-low noise, a wide dynamic range, good linearity, reliability, and durability. Secondly, these devices can compete with vacuum tubes in terms of shape, speed, form quality, and cost. Thirdly, space imaging applications require new detectors.
In the 1970s, Bell Labs in the USA successfully developed the world’s first CCD, and its birth brought about a leap in imaging and video technology. In 1973, Fairchild applied CCD technology in the commercial field, manufacturing the first commercial CCD imaging device, paving the way for CCD in the industrial sector. By the late 1980s, CCD replaced electronic tubes in most video applications. In the 1990s, CCD was applied in resolution imaging and widely used in professional electronic photography, space exploration, X-ray imaging, and other scientific fields.
CCD Image Sensors: Revolutionizing Image Recording

Two types of CCD products.

Image source from the internet.

The results of market applications have proven that CCD is a major technological revolution in the scientific field. After being overlooked for decades, it rightfully won the Nobel Prize in 2009.

Continuous Transformation

However, the progress of science and technology has never stopped. In 1998, the CMOS image sensor (Complementary Metal-Oxide-Semiconductor Image Sensor, CIS) was born. The photoelectric information conversion function of CMOS is fundamentally similar to that of CCD, with the difference being in the method of information transmission after photoelectric conversion. CMOS features simple information reading methods, fast output rates, low power consumption (about 1/10 of CCD chips), small size, light weight, high integration, and low cost. Starting in 2008, major manufacturers gradually began to use back-illuminated CMOS in various digital camera products. Since then, CMOS image sensors have rapidly developed.
CCD Image Sensors: Revolutionizing Image Recording

CMOS replaces CCD.

Image source from the internet.

As technology continues to evolve, it is believed that more types of sensors will emerge in the future; it is just a matter of time. When we look back at the film era, the CCD era, and the CMOS era, we will surely marvel at the rapid development of technology.

References

  1. https://www.nobelprize.org/prizes/physics/2009/summary/

  2. Zhang Rujing. The Story Behind the Semiconductor Industry [M]. Tsinghua University Press, 2013.

  3. Dong Yiting. Research on the Development of Photography Technology and Its Role in Contemporary Society [D]. Harbin Normal University, 2016.

  4. Smith, G. E. (2009). “The invention and early history of the CCD.” Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 607(1): 1-6.

  5. https://www.microscopyu.com/digital-imaging/introduction-to-charge-coupled-devices-ccds

  6. https://www.mega-9.com/tech/tech-45.html

  7. https://specinstcameras.com/what-is-a-ccd/

  8. Wang Qingyou. Application Technology of Image Sensors [M]. Electronics Industry Press, 2019.

  9. https://www.docin.com/p-505990925.html

  10. http://dc.yesky.com/88/31913588all.shtml

Reprinted content only represents the author’s viewpoint.

Does not represent the position of the Institute of Physics, Chinese Academy of Sciences.

Source: Institute of Semiconductors, Chinese Academy of Sciences

CCD Image Sensors: Revolutionizing Image Recording

Editor: Litchi Jelly

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CCD Image Sensors: Revolutionizing Image Recording

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