Introduction to SOC (Spin-On Carbon) in Semiconductor Manufacturing

1. Introduction: SOC (Spin-On Carbon) is a carbon-based film material deposited through a spin-coating process, primarily used in the photolithography step of semiconductor manufacturing. This technology involves applying a liquid polymer precursor with a high carbon content onto a semiconductor substrate, and then evenly distributing it by rapidly spinning the substrate to form a thin film. As the solvent evaporates, the polymer cures to form a…

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