New Advances in Overcoming Contact Resistance Bottlenecks in Integrated Circuits
The contact resistance of transistors at advanced nodes in integrated circuits has sharply increased with the continuous miniaturization of devices, becoming a critical bottleneck at the physical limits of Moore’s Law. Driven by Moore’s Law, device sizes continue to shrink, and the transistor source-drain contact resistance, which is inversely proportional to the contact area, has … Read more