The 3D silicon capacitor is a capacitive component manufactured based on semiconductor processes. Its development requires overcoming key technologies such as deep silicon etching, heterogeneous integration of dielectric materials and silicon-based materials, and balancing interface stress caused by differences in thermal expansion coefficients. Geli Micro has successfully developed the compact, high-density, low-parasitic, and highly reliable GCc series 3D silicon capacitor products based on proprietary processes. This product is suitable for:
- High temperature and high shock vibration scenarios (engines, munitions…);
- High-frequency application scenarios (RF, LiDAR…);
- Space-constrained scenarios (mobile phones, wearable devices…);
- High integration scenarios (microsystems, processors…).
Product Overview
The GCc series 3D silicon capacitors feature:
- High stability:
Temperature drift ≤ 70ppm/K (-55℃ ~ +150℃);
DC bias voltage drift ≤ 0.1%/V;
No aging drift phenomenon;
- High reliability:
High mechanical strength, impact resistance, no ceramic cracking;
Can withstand short-term high temperatures (over 300℃) during sealing and reflow soldering;
- Excellent temperature characteristics:
Wide operating temperature range: -55℃ ~ +150℃;
Can withstand short-term high temperatures (over 300℃) during sealing and reflow soldering;
- Excellent electrical parameters:
Low parasitic inductance, good high-frequency characteristics;
Low parasitic resistance, low leakage;
- Compact size;
Thickness can be reduced to 100um;
Offers various configurations such as coplanar electrodes, vertical electrodes, etc.;
Supports three assembly methods: wire bonding, flip chip, and soldering + wire bonding;
Product ImagesCoplanar electrode series (GCc1XXX): Available in various packages such as 0201, 0402, 0603, with both electrodes located in the same plane. The actual photo is shown below (0201 package):
Figure 1: Actual photo of coplanar electrode silicon capacitor
Figure 2: Schematic diagram of the lead distribution for coplanar electrode series silicon capacitors
Table 1: Selection table for GCc1XXX series capacitor products
Note: The thickness of the silicon capacitor can be adjusted according to user requirements.
Vertical electrode series (GCc2XXX series): Available in package types such as 0101, 015015, 0303, with the actual photo shown below (015015):
Figure 3: Actual photo of vertical electrode silicon capacitor
Table 2: Selection table for GCc2XXX series capacitors
Note: The thickness of the silicon capacitor can be adjusted according to user requirements.
Figure 4: Lead distribution of vertical electrode series silicon capacitorsCompany Introduction
Beijing Zhongke Geli Micro Technology Co., Ltd. was established in October 2017. As a national-level specialized and innovative “little giant” enterprise, it is committed to becoming a leader in the field of digital isolation technology. The company currently has over 240 employees and boasts an experienced mixed-signal integrated circuit design and MEMS design team, with four major R&D centers established in Beijing, Tianjin, Xi’an, and Chengdu.
Through independent research and development, the company has mastered core technologies such as electromagnetic digital isolators, capacitive digital isolators, and silicon capacitor design, and has established a comprehensive full-parameter testing platform. It has successfully developed and mass-produced multiple products.
Disclaimer:
This article is a reprint. This account maintains neutrality regarding all statements and views in original and reprinted articles, and the articles are provided for readers’ learning and communication purposes. The copyright of the articles, images, etc. belongs to the original authors.
Silicon Capacitor Industry Observation
The Silicon Capacitor Industry Observation,is dedicated to promoting the dissemination of silicon capacitor technology and product applications, fostering a prosperous industrial ecosystem. It shares the latest dynamics of the silicon capacitor industry, promotes industry communication and development, and aims to be a pioneer and dreamer in the industry.