The coating and developing machine is the equipment that completes all photolithography processes except exposure, including the coating of photolithographic materials, baking, developing, cleaning the back of the wafer, and rinsing the wafer surface with deionized water for immersion processes. Generally, the coating and developing machine consists of a power system, developing liquid tank, spray liquid pipe, washing tank, squeezing roller, coating tank, etc., and is suitable for processes involving semiconductors, chemical materials, silicon wafers, chips, substrates, conductive glass, etc.
“The Father of Semiconductor in China,” Zhang Rujing commented at the 2018 Integrated Circuit Industry Summit: “The weakest link in the development of China’s semiconductor industry is materials and equipment.” Meanwhile, the development and widespread application of semiconductor technology can significantly promote scientific and technological progress and social and economic development, making it a key industry supported by the state. Therefore, the independent research and improvement of semiconductor equipment like coating and developing machines has become a primary consideration for current development.
Figure | Ningbo Runhua Fully Automatic 8/12 Inch Coating and Developing Machine
Disadvantages of Coating and Developing Machines on the Market
Separation of Control Units
Coating and developing machines generally include spindle motors, robotic arms, metering pumps, exhaust systems, etc., while their main control unit is usually composed of an independent industrial computer and PLC controller. The separation of these two control units increases the programming difficulty for engineers and personnel investment, and is also not conducive to equipment maintenance and operation.
High Operational Difficulty and Complicated Configuration
Coating and developing machines require high precision and stability in controlling various components. The industrial computer itself generally does not directly support real-time communication protocols, and introducing a PLC controller into the entire system increases the operational difficulty of the equipment, requiring familiarity with the corresponding configuration software to complete system configuration, which will also increase wiring complexity.
Functions of Hongke HK-CIFX PC Communication Board
The Hongke HK-CIFX communication board is a computer board suitable for industrial Ethernet and fieldbus protocols, capable of quickly adding real-time communication to PC/IPC-based automation devices. It supports various mainstream real-time communication protocols such as EtherCAT, PROFINET, EtherNet/IP, and covers common PC card formats, providing users with interfaces for PCI, PCI Express, Compact PCI, Thin PCIe, Mini PCIe, Half-height PCI Express, M.2 format PCI Express, Mini PCI, PCI / 104, and PCI 104.
Integration of Control for Coating and Developing Machines
In this case, the Hongke HK-CIFX 50-RE model communication board is used as the EtherCAT master communication board, which can replace the external PLC controller in the coating and developing machine. Users only need to insert the HK-CIFX 50-RE communication board into the PCI slot of the industrial computer and burn the corresponding EtherCAT Master firmware to use this PC board as an EtherCAT master, thus easily integrating all main control units of the coating and developing machine into one industrial computer, achieving control integration. Additionally, the HK-CIFX communication board provides a unified API application programming interface, allowing programming in C, C++, C#, etc., enabling users to achieve real-time control of peripheral devices such as servo motors, robotic arms, and gas valves without needing to understand complex communication protocol specifications, only needing to focus on programming.
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Process The implemented process is as follows: |
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Insert HK-CIFX 50-RE into the PCI slot of the industrial computer |
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Install the corresponding driver for HK-CIFX 50-RE under the operating system |
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Install the configuration software SYCON.net that comes with the HK-CIFX communication board, which can conveniently handle firmware burning and EtherCAT network scanning. After the firmware and network configurations are correctly downloaded, subsequent operations do not require separate actions, as the industrial computer will automatically download upon startup. |
The HK-CIFX communication board provides users with a secondary development package, allowing users to call the corresponding API function interfaces to develop applications in IDE software such as Visual Studio, achieving periodic/non-periodic data transmission.
Key Features of Hongke HK-CIFX Communication Board:
Supports real-time communication protocols such as EtherCAT, PROFINET, EtherNet/IP, Modbus TCP, CANopen, Profibus, DeviceNet, CC-Link, etc.
Provides a unified API function interface for different operating systems and communication protocols
Supports drivers for operating systems such as Windows, Linux, Vxworks, INtime, RTX, QNX, etc.
Provides interface formats such as PCI, PCI Express, Compact PCI, Thin PCIe, Mini PCIe, Half-height PCI Express, M.2 format PCI Express, Mini PCI, PCI / 104, and PCI 104.
Access data through dual-port memory (DPM) or direct memory access.
The Hongke HK-CIFX communication board allows coating and developing machines to quickly add real-time communication to their PC-based automation devices, thereby merging discrete control units into a single unit, directly controlling the corresponding EtherCAT devices from the industrial computer. Users also do not need to delve into various real-time communication protocols, as they can directly call the corresponding API function interfaces to achieve application program design, which can also integrate with existing programs, allowing a single control program and one industrial computer to achieve all control. Similarly, this PC communication board can also be integrated into other semiconductor devices in this manner, such as stripping machines, coating machines, bonding machines, etc.
If you want to know more about the Hongke HK-CIFX communication board
Please contact Hongke at 400-999-3848
Hongke Intelligent Automation
Hongke is a high-tech company with over 15 years of experience in the field of industrial automation, particularly in the industrial bus communication industry. The Intelligent Automation Division of Hongke has deep cooperation with world-renowned experts in industrial automation, energy management, and building automation in Europe and the United States, providing top-level hardware and software solutions for communication protocols in the industry. The types of communication technology involve industrial automation communication protocols such as CAN, CANopen, EtherCAT, PROFINET, EtherNet/IP, IO-Link, OPC UA, MQTT, TSN, etc., and energy management and building automation communication protocols such as ASCII, BACnet, KNX, Modbus, etc. The solutions include codes, chips/modules, boards, gateways, IO, industrial computers, relays, testing programs, training, and development services. Therefore, Hongke is one of the few suppliers in China that has been deeply engaged in the OT field for many years and has comprehensive technical experience.
The Intelligent Automation Division of Hongke is customer demand-oriented and technology-capable, providing domestic enterprises with the most suitable products and the most satisfactory services. As a resource integrator of communication technology with the most complete chain and the richest solutions, and with technical service implementation, Hongke has served over 1,000 clients, and Hongke engineers have been playing a connecting role like a highway in the trend of the Internet of Everything, which is our mission and our pride.
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