Challenges and Opportunities for Semiconductor Equipment in the 14th Five-Year Plan
Originally published in the “Bulletin of the Chinese Academy of Sciences” 2025, Issue 5, Special Issue “Building a World-Class Science and Technology Power” – Special Topic “Current Status and Future Considerations of High-End Manufacturing”. Ye Tianchun1* Zhu Yu2 Zhang Guoming3 Du Xiaoli4 Lei Zhenlin5 Yuan Pengpeng1 1 Institute of Microelectronics, Chinese Academy of Sciences 2 … Read more