2023 Global Engineering Frontier | Large Size Semiconductor Silicon Carbide Materials and Power Chips

2023 Global Engineering Frontier | Large Size Semiconductor Silicon Carbide Materials and Power Chips

Large size semiconductor silicon carbide (SiC) materials mainly refer to silicon carbide single crystal substrates with diameters of 6 inches or even larger. Utilizing these substrates, high-quality epitaxial films can be obtained, which in turn can be used to manufacture high-performance power chips. Driven by the “dual carbon” goals, the large-scale application of semiconductor silicon … Read more