A Brief Discussion on Thermal Oxidation in Chip Manufacturing
Hello, everyone. Today, we will discuss thermal oxidation in chip manufacturing. Oxides have various applications in the semiconductor industry: Isolation (interlayer dielectrics, etc.) Scattering oxide layers (ion implantation) Adapting layers (local oxidation of silicon, etc.) Flattening (edge rounding, etc.) Mask layers (diffusion, etc.) Alignment marks (photolithography) Cover layers (corrosion prevention, etc.) And more When combined … Read more