Shanghai Institute of Microsystem and Information Technology: Engineering Progress in Integrated Edge AI MEMS Accelerometers for Tilt Measurement
High-resolution MEMS accelerometers are crucial core components in high-precision geological exploration, accurate identification of key geological features, and automated monitoring of deep foundation pits, and there is an urgent need for domestic replacement. Existing international manufacturers, such as Japan’s Murata, offer the SCA3300 series MEMS accelerometers, which achieve a high tilt resolution of 0.005°, making … Read more