Interview with Semiconductor Lithography Expert Dr. Pang Linyong: Full Chip ILT is the Key Technology for Downward Iteration in Semiconductors
[Image][Image]In the field of semiconductor manufacturing, lithography technology is the key process for transferring integrated circuit patterns. With the continuous advancement of Moore’s Law, the feature sizes of chip graphics are constantly shrinking, and lithography technology is facing unprecedented challenges. Among these, optical proximity effects cause deviations between the lithographic patterns on the wafer and … Read more